AVS 50th International Symposium
    Manufacturing Science and Technology Monday Sessions
       Session MS-MoA

Invited Paper MS-MoA3
Opportunities and Challenges in the Materials Supply Chain for Semiconductor Manufacturing

Monday, November 3, 2003, 2:40 pm, Room 309

Session: Challenges in Advanced Materials and New Processes for Semiconductor Manufacturing
Presenter: R.J. Richardson, Air Products and Chemicals, Inc.
Correspondent: Click to Email
Over 100 gases and chemicals are used to manufacture semiconductor devices. Many of these materials present formidable challenges in synthesis, purification, analysis, container and distribution system compatibility, contamination control, ESH and regulatory issues. As we near the end of the CMOS roadmap, a large number of new materials and processes are being considered to enable the manufacture of ever-smaller device structures. Although the large number of new candidate materials appears to provide a number of new opportunities, they bring a host of challenges. Only a few of the new alternatives will eventually end up in high volume manufacturing, which poses a dilemma for a full service materials supplier beyond the decisions related to the allocation of scarce R&D resources to multiple solutions to the same problem. How these issues (e.g., purity requirements, materials compatibility studies, ESH impacts) are addressed for some of the new materials under consideration for advanced CMOS manufacturing and the various competing trends (e.g., consistency of supply vs. ever-higher purity) facing the materials supplier will be discussed.