AVS 49th International Symposium
    Manufacturing Science and Technology Tuesday Sessions
       Session MS+MM-TuA

Invited Paper MS+MM-TuA1
Silicon Micromachines for Science and Technology

Tuesday, November 5, 2002, 2:00 pm, Room C-109

Session: Manufacturing Issues in MEMS and Related Microsystems
Presenter: D. Bishop, Bell Laboratories, Lucent Technologies
Correspondent: Click to Email
The era of silicon micromechanics is upon us. In areas as diverse as telecommunications, automotive, aerospace, chemistry, entertainment and basic science the ability to build microscopic machines from silicon is having a revolutionary impact. In my talk I will discuss what micromachines are, how they are built and show examples of how they will have a revolutionary impact in many areas of science as well as technology.