IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)


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Microelectromechanical Systems (MEMS) Sessions

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Start Time Session Code Session Title
Monday 9:40am PS1+MM-MoM Science & Technology of Microplasmas and MEMS Processing
Monday 9:40am TF+MM-MoM Thin Film Sensors
Tuesday 8:20am BI+MM-TuM Biomems & Microdevices
Tuesday 5:30pm BI-TuP Surface Characterization and Non-Fouling Surfaces Poster Session
Thursday 8:20am MM-ThM Characterization of MEMS Materials
Thursday 2:00pm MM-ThA Fabrication and Integration Processes for MEMS
Thursday 5:30pm MM-ThP Poster Session
Friday 8:20am MM+BI+NS+EL+SS-FrM New Frontiers in MEMS: NEMS and BioMEMS

IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)