Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MM-ThA1 Integration of a Honeycomb Micromirror with a Surface Micromachined 2D Scanner for Improved Performance P.R. Patterson, G.-D.J. Su, D. Hah, M.C. Wu, University of California at Los Angeles |
| 2:20pm | MM-ThA2 Freestanding Microheater in Si with High Aspect Ratio Microstructures W.-C. Tian, S.W. Pang, The University of Michigan |
| 2:40pm | MM-ThA3 Invited Paper MEMS and NEMS Physical and Chemical Sensors: Fabrication and Integration P.G. Datkos, Oak Ridge National Laboratory, T.G. Thundat, Oak Ridge Natioanl Laboratory, M.S. Sepaniak, University of Tennessee |
| 3:40pm | MM-ThA6 Fabrication of Novel Si@sub 3@N@sub 4@ Micromesh Spider Web Bolometer Using Deep Trench Etching on SOI Wafer M.H. Yun, Jet Propulsion Laboratory, Caltech-NASA, A.M.P. Turner, J.J. Bock, J.A. Podosek, Jet Propulsion Laboratory |
| 4:00pm | MM-ThA7 Analog Beam Steering Vertical Comb Drive MEMS Actuator J.J. Fijol, J. Prohaska, M. Smith, Standard MEMS, Inc., T. Wester, ProcessTek, G.W. Tasker, Standard MEMS, Inc. |
| 4:20pm | MM-ThA8 An Integrated MEMS Fabrication Technology Using SU-8 Negative Resists and Conducting Polymers S. Li, E. Smela, R. Ghodssi, University of Maryland at College Park |
| 4:40pm | MM-ThA9 Elimination of Defects on Quartz Plate Surface Induced by Deep Drying Etching and Subsequent Quartz Plate Bonding T. Fukasawa, H. Ogawa, Y. Horiike, The University of Tokyo, Japan |
| 5:00pm | MM-ThA10 Production Plasma Etching of PZT Structures for Piezoelectric Actuators L.G. Jerde, J.P. Almerico, S. Marks, P.F. Werbaneth, Tegal Corporation |