Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MM-ThM1 Invited Paper Mechanical Properties of MEMS Materials W. Sharpe, Johns Hopkins University |
| 9:00am | MM-ThM3 The Beam vs. Plate Distinction for Si Strips Mechanically Loaded in Bending S.K. Kaldor, Columbia University, I.C. Noyan, IBM T.J. Watson Research Division |
| 9:20am | MM-ThM4 Amorphous Diamond MEMS J.P. Sullivan, T.A. Friedmann, M.P. de Boer, M.T. Dugger, M. Mitchell, R.G. Dunn, R. Ellis, Sandia National Laboratories, D.A. LaVan, Massachusetts Institute of Technology |
| 9:40am | MM-ThM5 Fabrication Techniques and Integration Processes for a New Ultrananocrystalline Diamond (UNCD) -Based MEMS Technology and Characterization of UNCD Mechanical Properties O. Auciello, A.V. Sumant, D.M. Gruen, J.A. Carlisle, J. Birrell, N.A. Moldovan, D.C. Mancini, M. Angadi, Argonne National Laboratory, H.D. Espinosa, B.C. Prorok, Northwestern University |
| 10:00am | MM-ThM6 Silicon Carbide Films by Low Temperature CVD for MEMS Applications D. Gao, C.R. Stoldt, W.R. Ashurst, C. Carraro, R. Maboudian, University of California, Berkeley |
| 10:20am | MM-ThM7 Thermal Characteristics of Microswitch Contacts X. Yan, N.E. McGruer, G.G. Adams, Northeastern University, S. Majumder, Analog Devices, Inc. |
| 10:40am | MM-ThM8 MBE-grown Single-crystal Ferromagnetic Shape Memory Ni@sub 2@MnGa Thin Films J.W. Dong, J. Lu, J.Q. Xie, Q. Pan, J. Cui, S. McKernan, R.D. James, C.J. Palmstrom, University of Minnesota |
| 11:00am | MM-ThM9 Stability of Alkylsilane Monolayer Films in Humid Environments T.M. Mayer, H.I. Kim, M.G. Hankins, M.P. de Boer, Sandia National Laboratories |