IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Monday Sessions

Session TF+MM-MoM
Thin Film Sensors

Monday, October 29, 2001, 9:40 am, Room 123
Moderator: D.L. Pappas, Duracell


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

10:20am TF+MM-MoM3
MEMS Device Platforms as Research Tools for Developing Improved Sensing Films
C.J. Taylor, S. Semancik, R.E. Cavicchi, National Institute of Standards and Technology
10:40am TF+MM-MoM4
Correlation Between Gas Response of MIS Field-Effect Sensors and the Bond Strength Between the Metal and the Insulator Layer of the Device
A.E. Åbom, L. Hultman, M. Eriksson, Linköping University, Sweden
11:00am TF+MM-MoM5
On the Ammonia Response Mechanism of Field-effect Gas Sensors with Thin Pt Gates
M. Lofdahl, M. Eriksson, I. Lundstrom, Linköping University, Sweden
11:20am TF+MM-MoM6
Charge Transport Mechanisms in Epitaxial Tungsten Oxide Films Used for Chemiresistive Sensors
S.C. Moulzolf, R.J. Lad, University of Maine