| AVS 46th International Symposium | |
| Manufacturing Science and Technology Group | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MS-TuM1 Invited Paper Proposal of New Paradigm LSI Structures and Their Manufacturing T. Ohmi, M. Hirayama, Y. Shirai, Tohoku University, Japan |
| 9:00am | MS-TuM3 Invited Paper The IC Interconnect Millenium Transitions; Al to Cu, SiO@sub 2@ to Low-K K.A. Monnig, A.C. Diebold, SEMATECH |
| 9:40am | MS-TuM5 Invited Paper Cooperative University Research for Critical Front End IC Processes J.R. Hauser, North Carolina State University |
| 10:20am | MS-TuM7 Invited Paper Industrial-Academic-Government Partnerships; A Successful Example J.B. Bindell, Cirent Semiconductor (Lucent Technologies) |
| 11:00am | MS-TuM9 Invited Paper Cooperative Research on Environmentally Benign Semiconductor Manufacturing F. Shadman, NSF/SRC Engineering Research Center |
| 11:40am | MS-TuM11 EquiPSim: Hands-On Training in Semiconductor Equipment and Process Behavior A.R. Rose, G.W. Rubloff, N. Kositsyna, N. Gupta, R. Sreenivasan, W.S. Levine, University of Maryland |