AVS 46th International Symposium
    Manufacturing Science and Technology Group Tuesday Sessions
       Session MS-TuM

Paper MS-TuM11
EquiPSim: Hands-On Training in Semiconductor Equipment and Process Behavior

Tuesday, October 26, 1999, 11:40 am, Room 611

Session: New Manufacturing Research Paradigms
Presenter: G.W. Rubloff, University of Maryland
Authors: A.R. Rose, University of Maryland
G.W. Rubloff, University of Maryland
N. Kositsyna, University of Maryland
N. Gupta, University of Maryland
R. Sreenivasan, University of Maryland
W.S. Levine, University of Maryland
Correspondent: Click to Email
We have developed EquiPSim (Equipment and Process Simulation), a software-based learning system for semiconductor manufacturing aimed at providing active hands-on experience in the equipment and process environment of semiconductor manufacturing. Physically-based dynamic simulators, validated against experiment, were constructed on a commercial PC-based simulation software platform (VisSim@super TM@ v/3) and linked to a graphical user interface built on a Delphi@super TM@ v/4 visual development platform. As the learner operates the controls (actuators such as valves, settings, etc.) on the equipment or changes system design variables, system responds realistically and accurately in real time, allowing the user to explore system behavior freely and to carry out open-ended learning exercises. A host of user-controllable tools are also provided to present a rich learning environment, including: guidance, reference, and exercise materials in hypertext, accessed locally or over the Internet; active links between the guidance materials and the visual representation of the system; tools for modifying system design parameters; a lab notebook for recording design parameter and experimental results; and tools to enable distance collaboration. The software architecture is structured to facilitate separable authoring, in which the domain expert need concentrate only on the physical fidelity of the simulator and the guidance concepts to be taught, while the user interface is built from templates and predefined application objects by someone with modest software skills. Modules covering vacuum and gas flow technology, heat transfer mechanisms, and chemical reaction processes are aimed at novices, while modules in process control and optimization strategies are aimed at more experienced learners. The presentation will feature a live demonstration. Further information is available at the Center for Engineered Learning Systems (CELS) website at /www.isr.umd.edu/CELS/.