| AVS 58th Annual International Symposium and Exhibition | |
| Electronic Materials and Processing Division | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | EM-MoM1 Surface Cleaning and Monolayer Seeding for ALD of High-k Studied by In Situ STM, STS, and XPS Wilhelm Melitz, T. Kent, J. Shen, A.C. Kummel, University of California San Diego |
| 8:40am | EM-MoM2 Selective Area Regrowth of Self-Aligned, Low-Resistance Ohmic Contacts on InGaAs J.J.M. Law, A.D. Carter, G.B. Burek, B. Thibeault, M.J.W. Rodwell, A.C. Gossard, University of California, Santa Barbara |
| 9:00am | EM-MoM3 Invited Paper Boron Nitride Development and New Applications for sub-20nm Device Fabrication Mihaela Balseanu, L.Q. Xia, V. Nguyen, M. Naik, D. Cui, K. Zhou, J. Pender, B. Mebarki, Applied Materials, Inc. |
| 9:40am | EM-MoM5 Invited Paper Novel Organosilicate Polymers for Ultralow-Dielectric Films with High Modulus, Low CTE, and Closed-Pore Morphology DoYeung Yoon, J.H. Sim, Seoul National University, Korea, M. Liu, University of Michigan, H.W. Ro, C.L. Soles, National Institute of Standards and Technology, D.W. Gidley, University of Michigan |
| 10:40am | EM-MoM8 Invited Paper Interface Traps and Low Subthreshold Swing in III-V Tunnel FETs Alan Seabaugh, S.-D. Chae, P. Fay, W.-S. Hwang, T. Kosel, R. Li, Q. Liu, Y. Lu, T. Vasen, M. Wistey, H. Xing, G. Zhou, Q. Zhang, University of Notre Dame, R.M. Wallace, University of Texas at Dallas |
| 11:20am | EM-MoM10 Invited Paper Impact of Vertical Structured Devices for Future Nano LSI Tetsuo Endoh, Tohoku University, Japan |