AVS 54th International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
Monday 8:00am |
PS2+MS-MoM | Plasma Etching for Advanced Interconnects I |
Tuesday 1:40pm |
NS+MS-TuA | Characterization of Nanostructures |
Thursday 8:00am |
MS-ThM | Metrology and Characterization for Manufacturing |
Thursday 2:00pm |
MS-ThA | MEMS Manufacturing |