| AVS 54th International Symposium | |
| Manufacturing Science and Technology | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:20pm | MS-ThA2 Double-Exposure Gray-Scale Technology for Improved Vertical Resolution of 3D Photoresist Structures L.A. Mosher, University of Maryland, B.C. Morgan, U.S. Army Research Laboratory, R. Ghodssi, University of Maryland |
| 2:40pm | MS-ThA3 Invited Paper MEMS Manufacturing in a High Volume CMOS Wafer Fabrication Facility G.D. Winterton, Texas Instruments Inc. |
| 3:40pm | MS-ThA6 Manufacturing Challenges and Method of Fabrication of On-Chip Capacitive Digital Isolators P. Mahalingam, D. Guiling, S. Lee, R. Figueroa, W. Tian, Y. Patton, I. Khan, Texas Instruments |
| 4:00pm | MS-ThA7 A Novel Crystallized Silicon Thin Film Transistor Based Piezoresistive Cantilever Label Free Biosensor C. Zhan, P. Schuele, J. Conley, J. Hartzell, Sharp Laboratories of America, INC. |
| 4:20pm | MS-ThA8 Invited Paper Divergence in N/MEMS and Semiconductor Manufacturing J.D. Evans, Defense Advanced Research Projects Agency (DARPA) |