AVS 66th International Symposium & Exhibition
    MEMS and NEMS Group Tuesday Sessions

Session MN-TuM
MEMS, BioMEMS, and MEMS for Energy: Processes, Materials, and Devices II

Tuesday, October 22, 2019, 8:00 am, Room A210
Moderators: Robert Davis, Brigham Young University, Zenghui Wang, Case Western Reserve University


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am MN-TuM1 Invited Paper
Near-Zero Power Integrated Microsystems for the IoT
M. Rinaldi, Northeastern University, Zhenyun Qian
8:40am MN-TuM3
Development of Inorganic Metal Salt Inks for Printable Sensor Applications
Y. Sui, Case Western Reserve University, A. Hess-Dunning, Louis Stokes Cleveland VA Medical Center, R.M. Sankaran, Christian Zorman, Case Western Reserve University
9:00am MN-TuM4
Void-Free Copper Electrodeposition in Full Wafer Thickness Through-Silicon Vias with 10:1 Aspect Ratios
Rebecca Schmitt, L. Menk, C. Sadler, E. Baca, A.E. Hollowell, Sandia National Laboratories
9:20am MN-TuM5
Ion-Conducting Materials and Devices for Cold Atom Microsystems
Christopher Roper, HRL Laboratories, LLC, S. Kang, NIST, R.P. Mott, A.V. Mis, HRL Laboratories, LLC, E.A. Donley, J. Kitching, NIST
9:40am MN-TuM6
Determining the Material Properties of Carbon Nanotube Structures Through Cantilever Resonances
Richard Cass, Brigham Young University, E. Eion Hindsman-Curry, University of Alabama, R. Vanfleet, R.C. Davis, D.D. Allred, B. Anderson, R.R. Vanfleet, Brigham Young University
11:00am MN-TuM10
Nanoporous Titanium Nitride Electrodes for Biosensing
Mark Ming-Cheng Cheng, G. Chen, Wayne State University
11:20am MN-TuM11
Toward a Simple Process for Fabricating Multi-channel Neural Probes on Optical Fiber Substrates
Md Ashiqur Khan, M. Gheewala, V.S. Jonnalagadda, T.A. Tisa, M. Rao, A. Awale, P. Motwani, N.S. Randhawa, H. Sajedi, W.-C. Shih, J.C. Wolfe, University of Houston, J.A. Dani, University of Pennsylvania, P. Mauger, No Matching Affiliation
11:40am MN-TuM12
A Low-Temperature Packaging Process for Mechanically-Adaptive Neural Interfaces for Microfluidic-Aided Drug Delivery
E. Szabo, L. Greenwood, Case Western Reserve University, Allison Hess-Dunning, Louis Stokes Cleveland VA Medical Center
12:00pm MN-TuM13
Vascular Graft Pressure-Flow Monitoring Using Nanocomposite Carbon Black/PDMS Based Strain Sensors
Hao Chong, Case Western Reserve University, S.J.A. Majerus, Louis Stokes Cleveland VA Medical Center, J. Liu, C.A. Zorman, Case Western Reserve University