| AVS 66th International Symposium & Exhibition | |
| MEMS and NEMS Group | Tuesday Sessions |
| Session MN-TuM |
| Session: | MEMS, BioMEMS, and MEMS for Energy: Processes, Materials, and Devices II |
| Presenter: | Richard Cass, Brigham Young University |
| Authors: | R.J. Cass, Brigham Young University E. Eion Hindsman-Curry, University of Alabama R. Vanfleet, Brigham Young University R.C. Davis, Brigham Young University D.D. Allred, Brigham Young University B. Anderson, Brigham Young University R.R. Vanfleet, Brigham Young University |
| Correspondent: | Click to Email |
Nanotube Templated Microfabrication (CNT-M) processes use nanotube forest growth from a 2-D pattern to form 3-D structures. The resulting structure is then infiltrated with a second material to form the final device. Materials properties of these structures with different infiltration materials and varying degrees of infiltration is of interest.
We have used force-displacement data (in fixed-free and 3-point bending configurations) to determine the Ultimate Strength, the Young’s Modulus, and the Maximum Strain of CNT-M structures using various infiltration materials. However, in the case of tungsten infiltration processes and typical test beams (~250 um in width), the infiltration was not sufficiently uniform for high confidence results. Smaller beams (< 50 um width) are difficult to handle using the conventional 3-point bending processes. We report resonance frequency testing, using a Laser Doppler Vibrometer (LDV), of thin CNT-M cantilevers to find the Young’s Modulus of these CNT structures.