| AVS 65th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Monday Sessions |
| Session PS+TF-MoM |
| Session: | Plasma Deposition and Plasma-Enhanced ALD |
| Presenter: | Dhruval Patel, University of Illinois at Urbana-Champaign |
| Authors: | D. Patel, University of Illinois at Urbana-Champaign L. Bonova, University of Illinois at Urbana-Champaign C. Ahn, University of Illinois at Urbana-Champaign D.V. Krogstad, University of Illinois at Urbana-Champaign D.N. Ruzic, University of Illinois at Urbana-Champaign S. Chaudhuri, University of Illinois at Chicago |
| Correspondent: | Click to Email |
Partially stabilized zirconia is widely used in thermal barrier coatings that requires a thermodynamically stable and highly durable interface with a natively grown aluminum oxide (Al2O3) scale. The potential of ZrO2 to serve as an effective Thermal barrier coating (TBC) has already been demonstrated along with modest corrosion resistance. The ECAP experiment (Evaporative Coatings at Atmosphere Pressure) was developed at CPMI (Center for Plasma Materials Interaction at UIUC) as a device for surface treatment at atmosphere pressure utilizing a 2.45 GHz microwave plasma torch. Recent modifications to this system allows for delivery of precursors and target materials through the torch that gives it the capability to deposit thin films. The goal of this study is to compare the quality of the ZrO2 films grown using each of these methods. Various methods will be used to characterize the quality of films grown including Nanoindentation, XPS, XRD and Profilometry.