AVS 65th International Symposium & Exhibition | |
Plasma Science and Technology Division | Monday Sessions |
Session PS+TF-MoM |
Session: | Plasma Deposition and Plasma-Enhanced ALD |
Presenter: | Jérémy Mertens, Université Libre de Bruxelles, Belgium |
Authors: | J. Mertens, Université Libre de Bruxelles, Belgium J. Baneton, Université Libre de Bruxelles, Belgium A. Ozkan, Université Libre de Bruxelles, Belgium F. Reniers, Université Libre de Bruxelles, Belgium |
Correspondent: | Click to Email |
Last decades, atmospheric plasma systems have become a powerful tool for the synthesis of organic/inorganic coatings. Even though the well-known Yasuda parameter1 is a good indicator of the fragmentation process of the injected monomers during the low-pressure synthesis, it faces severe limitations at ambient conditions. This can essentially be related to the wider range of collisions and the lower mean free path of the plasma species at atmospheric pressure. Also, the key role of the chemical structure of the injected monomer such as the presence of double bonds on the synthesized coating properties has not been included in the Yasuda model but strongly influences the plasma polymerization/fragmentation mechanisms.2
It is well known, not only in plasma science, that the presence of double bonds increases the deposition rate which has been confirmed in this research. Yet, our group previously demonstrated that unsaturations could also play a protective role of an ester function during the atmospheric plasma polymerization process3 but no explanationwas proposed so far. Using various saturated and unsaturated precursors, this study proposes a novel point of view of the essential role of the presence of sp2 carbon atoms, their spacing with a function of interest and the planar geometry of the monomer in the polymerization mechanisms in dielectric barrier systems. Therefore, the plasma phase and physico-chemical properties of the synthesized coatings analysis are correlated. The influence of the addition of each molecule on the electrical behavior of the discharge is monitored by oscilloscope measurements. The fragmentation of the precursor in the plasma, evidenced by in situ mass spectrometry and optical emission spectroscopy, show that the polymerization mechanisms are different when the precursor contains double bonds. The suggested synthesis pathways for each precursor are correlated to the surface and bulk chemical structure of the synthesized films, determined by X-Ray photoelectron spectroscopy and infrared reflectance absorbance spectroscopy. It is evidenced that the distance separating the function of interest from the double bond is a major parameter to take in account for the conservation of the structure of the injected molecule. We suggest that it is possibly due to a planar geometry arrangement and to a resonance phenomenon for specific double bonds positions.
The authors would like to thank the Walloon Region for their financial support through the FLYCOAT project (n°131847).
1 H.K.Yasuda & al. , J. Polym. Sci., 16, 743
2 J.Hubert & al., Plasma Process. Polym. 2015, 12, 1174
3 A.Batan & al., Plasma Process. Polym. 2013, 10, 857