| AVS 63rd International Symposium & Exhibition | |
| Manufacturing Science and Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | MS+AS-TuM1 Thermal Decomposition Properties of Bis(cyclopentadienyl)magnesium for Various Gas Supply System Materials Hidekazu Ishii, Tohoku University, Japan, S. Yamashita, M. Nagase, A. Hidaka, K. Ikeda, Fujikin Incorporated, Japan, Y. Shiba, Y. Shirai, S. Sugawa, Tohoku University, Japan |
| 8:40am | MS+AS-TuM3 Invited Paper High Volume Materials Characterization in the CMOS Industry Paul van der Heide, GLOBALFOUNDRIES |
| 9:20am | MS+AS-TuM5 Invited Paper Dynamics in SIMS Characterization for Advanced Nano-Technology: Challenges and Solutions for Novel Materials and 3-D Devices Marinus Hopstaken, IBM T.J. Watson Research Center |
| 11:20am | MS+AS-TuM11 Characterization of Electrical Properties of Si and GaN Devices using Scanning Microwave Impedance Microscopy (sMIM) and Nano-scale Capacitance-voltage Curves Stuart Friedman, F. Stanke, Y. Yang, O. Amster, PrimeNano, Inc |
| 11:40am | MS+AS-TuM12 Invited Paper Results of the 2016 Triennial Review of the National Nanotechnology Initiative James Murday, University of Southern California, B.R. Rogers, Vanderbilt University, E.B. Svedberg, The National Academies |