| AVS 63rd International Symposium & Exhibition | |
| Manufacturing Science and Technology | Tuesday Sessions |
| Session MS+AS-TuM |
| Session: | Characterization and Processing for IC Manufacturing |
| Presenter: | Hidekazu Ishii, Tohoku University, Japan |
| Authors: | H. Ishii, Tohoku University, Japan S. Yamashita, Fujikin Incorporated, Japan M. Nagase, Fujikin Incorporated, Japan A. Hidaka, Fujikin Incorporated, Japan K. Ikeda, Fujikin Incorporated, Japan Y. Shiba, Tohoku University, Japan Y. Shirai, Tohoku University, Japan S. Sugawa, Tohoku University, Japan |
| Correspondent: | Click to Email |
High purity Bis(cyclopentadienyl)magnesium(Cp2Mg) is used as chemical vapor deposition material of semiconductor devises and dopant for obtaining p-type conduction in GaN based material devices. However, precise control of supply concentration of Cp2Mg is very difficult because its vapor pressure is very low. Generally, Cp2Mg is supplied from a precursor container to the film formation chamber by bubbling with the carrier gas. In this method, the tubing for the gas supply must be heated to avoid deposition of Cp2Mg on the inner surface of tube, which leads to a concern of decomposition of Cp2Mg. Thus, understanding of thermal decomposition properties of Cp2Mg for various materials for gas supply tube is important. In this report, we report evaluation results of thermal decomposition properties of Cp2Mg for various materials such as SUS316L stainless steel and Cr2O3, Al2O3-passivated stainless steel that are used for gas tubing, as well as Ni-Co alloy and Hastelloy C-22 that are used for a valve diaphragm.