| AVS 63rd International Symposium & Exhibition | |
| Manufacturing Science and Technology | Tuesday Sessions |
| Session MS+AS-TuM |
| Session: | Characterization and Processing for IC Manufacturing |
| Presenter: | James Murday, University of Southern California |
| Authors: | J.S. Murday, University of Southern California B.R. Rogers, Vanderbilt University E.B. Svedberg, The National Academies |
| Correspondent: | Click to Email |