AVS 57th International Symposium & Exhibition
    Vacuum Technology Monday Sessions

Session VT+MN-MoM
MEMS Sensors, Vacuum Gauges, Measurements and Pumps

Monday, October 18, 2010, 8:20 am, Room Laguna
Moderator: J. Fedchak, National Institute of Standards and Technology


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Click a paper to see the details. Presenters are shown in bold type.

8:20am VT+MN-MoM1 Invited Paper
Practical Issues and Applications for Vacuum and Hermetic Microsystems Packaging
L. Fang, D. Chu, K. Ewsuk, Sandia National Laboratories
9:00am VT+MN-MoM3
New NIST Comparison Method Calibration Service for Vacuum Gauges Based on MEMS Pressure Sensors
J.H. Hendricks, D.A. Olson, NIST
9:20am VT+MN-MoM4
Pirani for Industrial Processes
B. Andreaus, R. Enderes, M. Wuest, INFICON Ltd, Liechtenstein
9:40am VT+MN-MoM5
Nitrogen Incorporated Ultrananocrystalline Diamond as a Robust Cold Cathode Material for Miniature Mass Spectrometry Application in Space Exploration
X. Wang, University of Puerto Rico; Argonne National Laboratory, S. Getty, NASA Goddard Space Flight Center, A.V. Sumant, O.H. Auciello, Argonne National Laboratory, D. Glavin, P. Mahaffy, NASA Goddard Space Flight Center
10:40am VT+MN-MoM8
The Pumping Synergies of Integrated NEG and SIP Pumps for UHV Applications
A. Bonucci, A. Conte, L. Caruso, L. Viale, P. Manini, SAES Getters S.p.A., Italy
11:00am VT+MN-MoM9
NEG+: A Novel Route to Compact, High Performance Pumping in UHV-XHV Vacuum Systems
P. Manini, A. Bonucci, A. Conte, L. Viale, L. Caruso, SAES Getters S.p.A., Italy
11:20am VT+MN-MoM10
Direct Simulation Monte Carlo Modeling of Miniature Vacuum Pumps
B.J. Davis, R.W. Hill, P.H. Sorensen, R.J. Kline-Schoder, Creare Incorporated
11:40am VT+MN-MoM11
Improvements in the Performance of Turbomolecular Pumps Beyond the Molecular Range
A. Chew, B. Brewster, I. Olsen, S. Ormrod, Edwards Ltd, UK