AVS 57th International Symposium & Exhibition
    Vacuum Technology Monday Sessions
       Session VT+MN-MoM

Paper VT+MN-MoM11
Improvements in the Performance of Turbomolecular Pumps Beyond the Molecular Range

Monday, October 18, 2010, 11:40 am, Room Laguna

Session: MEMS Sensors, Vacuum Gauges, Measurements and Pumps
Presenter: A. Chew, Edwards Ltd, UK
Authors: A. Chew, Edwards Ltd, UK
B. Brewster, Edwards Ltd, UK
I. Olsen, Edwards Ltd, UK
S. Ormrod, Edwards Ltd, UK
Correspondent: Click to Email
A new range of turbomolecular pumps, nEXT, has been developed. This incorporates a new damping mechanism and pumping stage options. A new Siegbahn drag stage in combination with a regenerative mechanism are described in their combination with pure turbomolecular stages. Consequent increased backing pressures, high compression ratios and the facilitisation of a boost port being used to back other turbos will be described.