AVS 53rd International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 2:00pm | NM+MS+IPF-MoA | Beyond CMOS: Emerging Materials and Devices |
| Tuesday 8:00am | PS1+MS+NM-TuM | Plasma Patterning |
| Tuesday 2:00pm | MS-TuA | Process Integration and Modeling for Nano-scale Semiconductor Devices |
| Thursday 2:00pm | MS-ThA | Sensors, Metrology, and Control |