AVS 53rd International Symposium
    Nano-Manufacturing Topical Conference Wednesday Sessions

Session NM+NS+NNT-WeM
International Developments in Nanoimprint Lithography

Wednesday, November 15, 2006, 8:00 am, Room 2018
Moderator: S. Matsui, University of Hyogo, CREST JST, Japan


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am NM+NS+NNT-WeM1 Invited Paper
Nanoimprint: Diversity in Materials, Processes and Application
H. Schift, Paul Scherrer Institute (PSI), Switzerland, J. Ahopelto, VTT Centre for Microelectronics, Finland, A. Kristensen, Technical University of Denmark, C.M. Sotomayor Torres, Tyndall National Institute, Ireland, M. Tormen, INFM-TASC, Italy
8:40am NM+NS+NNT-WeM3 Invited Paper
Nanoimprint Lithography: Technology, Applications and Commercialization
S.Y. Chou, Princeton University
9:20am NM+NS+NNT-WeM5 Invited Paper
Nanoimprint and Nanopatterning in Japan
H. Hiroshima, National Institute of Advanced Industrial Science and Technology (AIST), Japan
10:40am NM+NS+NNT-WeM9 Invited Paper
Metrology for Nanoimprint Technologies: Needs and Prospects
C.L. Soles, H.W. Ro, Y. Ding, H.J. Lee, R.L. Jones, A. Karim, National Institute of Standards & Technology
11:20am NM+NS+NNT-WeM11 Invited Paper
Large Area Ultraviolet Nanoimprint Lithography Applicable to Flat Panel Display
E.-S. Lee, Korea Institute of Machinery & Materials, Korea