AVS 53rd International Symposium
    Nano-Manufacturing Topical Conference Wednesday Sessions
       Session NM+NS+NNT-WeM

Invited Paper NM+NS+NNT-WeM5
Nanoimprint and Nanopatterning in Japan

Wednesday, November 15, 2006, 9:20 am, Room 2018

Session: International Developments in Nanoimprint Lithography
Presenter: H. Hiroshima, National Institute of Advanced Industrial Science and Technology (AIST), Japan
Correspondent: Click to Email
In a while after Prof. Chou had revealed the potential of nanoimprint a decade ago, a few groups in Japan started studying on nanoimprint technology. But now many groups use nanoimprint and notice the ability. People can feel the nanoimprint fever in Japan as indicated by the nanoimprint and nanoprint technology conference (NNT) 2005 held in Nara. In Japan, many nanotechnology projects run under support by the government; however, nanopatterning using nanoimprint is strangely excluded. One of resent topics on research situation is that Nanoimprint Process Solutions (NiPS) Consortium was established in April 2005. The group of Dr. Maeda in national research institute of advanced industrial science and technology (AIST) plays a central role in the consortium and provides technical supports to the NiPS members. Another is that a nanoimprint technology study group, whose chair person is Dr. Komuro in AIST, was born in April 2006 as a valuable by-product of NNT2005. There are three powerful groups in the study group; one is the group of Prof. Matsui at university of Hyogo that shifted its focus from thermal nanoimprint to room-temperature nanoimprint; another is the group of Prof. Hirai at Osaka prefecture university that fabricates fluid devices using an improved reversal nanoimprint; and the other is our AIST group "nanoimprint manufacturing technology group" that covers high-temperature nanoimprint onto glass materials, roller nanoimprint and also UV-nanoimprint. In my presentation, I should like to introduce outlines on the activities of these groups and to show the diversity of research and development of the nanoimprint technology in Japan.