| AVS 50th International Symposium | |
| Electronic Materials and Devices | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| EM+SC-TuP2 A New Method to Produce Silicon-on-Insulator Wafer-Ar@super +@ Implantation with H@super +@-plasma Processing B. Chen, New Jersey Institute of Technology, A. Usenko, New Jersey Silicon Wafer Tech, W. Carr, New Jersey Institute of Technology |
| EM+SC-TuP3 Effects of Remasking Materials and Dimensions on Sidewall Roughness of Deep Etched Waveguide J.W. Bae, W. Zhao, J.H. Jang, I. Adesida, University of Illinois at Urbana Champaign, A. Lepore, M. Kwakernaak, J.H. Abeles, Sarnoff Corporation |
| EM+SC-TuP4 Sub 100 nm Radius of Curvature Wide-Bandgap III-Nitride Vacuum Microelectronic Field Emitter Structures Sharpened by ICP Etching P.B. Shah, M.D. Derenge, B.M. Nichols, T.S. Zheleva, K.A. Jones, US Army Research Laboratory |
| EM+SC-TuP5 A Study of Silicon Carbide (SiC) Etching Characteristics using Magnetized Inductively Coupled Plasmas (MICP) H.Y. Lee, D.W. Kim, Sungkyunkwan University, South Korea, Y.J. Sung, Samsung Advanced Institute of Technology, South Korea, G.Y. Yeom, Sungkyunkwan University, South Korea |
| EM+SC-TuP6 Electroless Copper Deposition as a Seed Layer on TiSiN Barrier Y.C. EE, Z. Chen, S. Xu, Nanyang Technological University, Singapore, L. Chan, K.H. See, S.B. Law, Chartered Semiconductor Manufacturing Ltd., Singapore |
| EM+SC-TuP8 Thermal Conductivity Analysis of Highly-Oriented Diamond Films for Silicon on Diamond Electronic Applications N. Govindaraju, North Carolina State University, A. Aleksov, North Carolina State Univeristy, F. Okuzumi, G.N. Yushin, North Carolina State University, S.D. Wolter, J.T. Prater, Army Research Office / AMSRL- RO-PM, Z. Sitar, North Carolina State University |
| EM+SC-TuP9 Deposition and Field-Emission Characterization of Electrically Conductive Diamond-Like Amorphous Carbon Films H. Kinoshita, R. Ikuta, K. Sakurai, S. Murakami, Shizuoka University, Japan |
| EM+SC-TuP10 Avalanche Ballistic Electron Emission Microscopy (BEEM) Studies of Subthreshold BEEM Current and STM Induced Photocurrent C. Tivarus, E.R. Heller, J.P. Pelz, The Ohio State University |
| EM+SC-TuP11 Submicron MTJ Cell Selectivity and Switching Field Analysis using Scanning Probe Microcopy Technique D.S. Kim, J. Heo, I.S. Chung, SungKyunKwan University, Korea |
| EM+SC-TuP12 The Analysis on the Origin of High Resistivity in Polycrystalline CdZnTe Thick Films K.H. Kim, S.Y. Ahn, M.H. Kim, Y.J. Park, K.N. Oh, S.U. Kim, Korea University |
| EM+SC-TuP13 Electrical, Thermal, and Elastic Properties of MAX Phase Materials S.E. Lofland, P. Finkel, J.D. Hettinger, Rowan University, M.W. Barsoum, A. Ganguly, S. Gupta, Drexel University, K. Harrell, J. Palma, B. Seaman, Rowan University |
| EM+SC-TuP14 Photo-electronic Properties of n-ZnO:Al/p-Si Heterojunctions F. Mohammed, A. Pontarelli, S. Bokhari, J.R. Doyle, Macalester College |
| EM+SC-TuP15 Effects of Threading Dislocations and In Composition on Structural and Optical Properties in InGaN/GaN Triangular-shaped Quantum Wells R.J. Choi, Y.B. Hahn, H.J. Lee, Chonbuk National University, Korea |
| EM+SC-TuP16 Electroluminescence in the Infrared Region from Thin Film Zinc Sulfide Doped with Rare Earth Fluorides D. DeVito, N. Shepherd, A.S. Kale, W. Glass, M.R. Davidson, P.H. Holloway, University of Florida |
| EM+SC-TuP17 Visible and Near-infrared Electroluminescence from Er-doped GaN Thin Films Prepared by RF Planar Magnetron Sputter Deposition J.H. Kim, M.R. Davidson, N. Shepherd, P.H. Holloway, University of Florida |