AVS 49th International Symposium
    Processing at the Nanoscale Thursday Sessions
       Session PN-ThA

Invited Paper PN-ThA9
Nanoscale Morphology Control Using Ion Beams

Thursday, November 7, 2002, 4:40 pm, Room C-109

Session: Charged Particle Patterning and Emission
Presenter: M.J. Aziz, Harvard University
Correspondent: Click to Email

Low energy ion irradiation of a solid surface can be used to control surface morphology on length scales from 1 micron to 1 nanometer. Focused or unfocused ion irradiation induces a spontaneous self-organization of the surface into nanometer-sized ripples, dots, or holes; it also induces diameter increases and decreases in a pre-existing nanopore by a tradeoff between sputter removal of material and stimulated surface mass transport. Here we report experiments that illuminate the kinetics of evolution of the surface morphological instability; the influence of initial and boundary conditions on guiding the self-organization; and the kinetics governing the fabrication of nanopores for single-molecule detectors.