AVS 49th International Symposium
    Microelectromechanical Systems (MEMS) Thursday Sessions
       Session MM+TF-ThM

Invited Paper MM+TF-ThM3
Challenges of Compressible Microfluidics and MEMS Device Development

Thursday, November 7, 2002, 9:00 am, Room C-210

Session: Development and Characterization of MEMS Materials
Presenter: C.B. Freidhoff, Northrop Grumman ES
Authors: C.B. Freidhoff, Northrop Grumman ES
E. Hong, The Pennsylvania State University
R.L. Smith, University of Maryland-Baltimore County
T.T. Braggins, Northrop Grumman ES
S.V. Krishnaswamy, Northrop Grumman ES
S. Trolier-McKinstry, The Pennsylvania State University
Correspondent: Click to Email
MEMS vacuum pump for a miniature mass spectrograph challenges current modeling techniques compared to other microfluidic devices that utilize incompressible fluids. The ability to estimate boundary layers accurately is needed to save resources in determining the optimum dimensions for geometries in the micrometer scale. This device development also adds in the need for dynamic analysis over a broad pressure range. Results for actuator and pump performance measurements as well as results on the expected reliability of the thin films used in the pump's mechanical operation will be presented. The paper will discuss the challenges and empirical results we have achieved to date.