AVS 49th International Symposium
    Microelectromechanical Systems (MEMS) Thursday Sessions
       Session MM+TF-ThM

Paper MM+TF-ThM6
Stiction/Friction Studies of MEMS Materials Using a Novel Microtriboapparatus

Thursday, November 7, 2002, 10:00 am, Room C-210

Session: Development and Characterization of MEMS Materials
Presenter: B. Bhushan, The Ohio State University
Authors: H. Liu, The Ohio State University
B. Bhushan, The Ohio State University
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Microelectromechanical systems (MEMS) are the next logical step in "silicon revolution". Many studies have shown that stiction/friction impacts the efficiency, power output, and steady-state speed of microdevices. It is essential to study the stiction/friction of the compoents and materials that are commonly used in MEMS/NEMS devices. A microtriboapparatus is needed which can be used to perform stiction/friction studies using microcomponents relevant for applications. Such an apparatus has been developed and used in this study. In this apparatus, two components/specimens are mounted on two piezos, which can deliver the motion in X and Z directions, respectively. A total of four fiber optical sensors are used to measure the sample displacement in X and Z directions, adhesive force, friction force, and normal load. The microtribological properties of silicon, diamond like carbon films are investigated by this apparatus. Experiments have been also performed to study the effect of velocity, relative humidity and temperatures on these materials.