IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Electronics Wednesday Sessions

Session EL-WeA
Semiconductor Growth

Wednesday, October 31, 2001, 2:00 pm, Room 124
Moderator: E. Rotenberg, Lawrence Berkeley National Laboratory


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Click a paper to see the details. Presenters are shown in bold type.

2:00pm EL-WeA1 Invited Paper
Epitaxial Growth by Low-energy Plasma-enhanced CVD
H. von Känel, ETH Zürich, Switzerland, M. Kummer, A. Dommann, Interstate University of Applied Science, Switzerland, C. Rosenblad, J. Ramm, Unaxis Semiconductors, Liechtenstein, T. Hackbarth, M. Zeuner, Daimler Chrysler Research Center, Germany
2:40pm EL-WeA3
Self-Limited Layer-by-Layer Growth of Si by Alternated SiH@sub4@ Supply and Ar Plasma Exposure
D. Muto, T. Seino, T. Matsuura, J. Murota, Tohoku University, Japan
3:00pm EL-WeA4
Detrimental Effects in using Surfactant Assisted Growth
G.G. Jernigan, P.E. Thompson, M. Fatemi, M.E. Twigg, U.S. Naval Research Laboratory
3:20pm EL-WeA5
Optical and Structural Characterization of GaN Films Grown by Molecular Beam Epitaxy on SiC Coated Si Substrates
M. Lopez-Lopez, M. Cervantes-Contreras, M. Melendez-Lira, M. Tamura, CINVESTAV-IPN, Mexico
3:40pm EL-WeA6
Detailed Modeling of Si Gas-source MBE: Descriptions on Growth Rate and Hydrogen Coverage
T. Murata, M. Suemitsu, Tohoku University, Japan
4:00pm EL-WeA7
Growth and Doping Kinetics in Si Gas-source MBE with In-situ Phosphrous-doping
M. Suemitsu, Y. Tsukidate, Tohoku University, Japan
4:40pm EL-WeA9
Improved Surface Preparation for High Quality Homoepitaxial Growth of SiC
W.V. Lampert, C.J. Eiting, S.A. Smith, L. Grazulis, J.S. Solomon, T.W. Haas, Air Force Research Laboratory, Materials and Manufacturing Directorate
5:00pm EL-WeA10
Initial Stages of Al@sub x@Se@sub y@ Heteroepitaxial Growth on Si(111)
J.A. Adams, A.A. Bostwick, University of Washington, E. Rotenberg, Advanced Light Source, Berkeley, F.S. Ohuchi, M.A. Olmstead, University of Washington