AVS 64th International Symposium & Exhibition | |
Plasma Science and Technology Division | Wednesday Sessions |
Session PS+SS+TF-WeA |
Session: | Plasma Deposition |
Presenter: | David Ruzic, University of Illinois at Urbana-Champaign |
Authors: | D.N. Ruzic, University of Illinois at Urbana-Champaign S. Hammouti, University of Illinois at Urbana-Champaign B.J. Holybee, University of Illinois at Urbana-Champaign B.E. Jurczyk, Starfire Industries |
Correspondent: | Click to Email |
Thin films surfaces are playing an increasing role in the application of smart materials. This covers the improvement of surface properties like hardness, corrosion resistance, thermal, magnetic properties and so on depending on the application field. Many methods evolved for the preparation of thin films and coatings and among them the laser surface treatment. Since a decade, femtosecond laser micro-machining has been successfully introduced in industry for optic, surface wetting, biological or catalytic applications. The high precision achieved with femtosecond lasers for drilling or texturing purposes originates primarily from the limited heat affected zone which is greatly reduced compared to that of laser systems with longer pulse duration such as nano or picosecond. Moreover, ultrafast laser surface processing provides a simple way of nanostructuring and surface functionalization towards optical, mechanical or chemical properties. Indeed, irradiation of surfaces with short laser pulses of high intensity in a reactive atmosphere can result in a direct coating formation if the laser parameters are properly adjusted.
In this study, femtosecond laser processing of titanium surface in nitrogen (laser nitriding) has been investigated due to technological importance of nitrogen in metals and alloys for fusion applications. A two-step process consisting firstly to a femtosecond laser texturing of titanium surface under argon and then under nitrogen, both at atmospheric pressure, has been used. The laser treatment under argon has been proved to be efficient to remove most of the oxide layer which otherwise reduce the formation of titanium nitride. Several laser parameters for both laser treatments have been tested to obtain the best combination for the generation of titanium nitride. Beside chemical modifications of titanium surface, the formation of self-organized micro/nanostructures usually observed after irradiation in an ultrashort regime which result in topographic modifications are also of the high interest for wetting properties. Due to nonthermal effects involved in the ultrashort femtosecond processes the normal nitrogen diffusion process, as in the case of nanosecond laser nitriding. The titanium nitride layer produced by the femtosecond pulses most probably corresponds to nitride fall out from the recondensing plasma formed after the laser pulse above the irradiated surface, containing titanium and nitrogen ions and atoms.