AVS 64th International Symposium & Exhibition
    Nanometer-scale Science and Technology Division Wednesday Sessions

Session NS+MN+MS+SS-WeA
Nanopatterning, Nanofabrication and 3D Nanomanufacturing

Wednesday, November 1, 2017, 2:20 pm, Room 19
Moderator: Brian Borovsky, St. Olaf College


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:20pm NS+MN+MS+SS-WeA1
Site-controlled Si Nanodot Formation for a RT-SET via Ion Beam Mixing and Phase Separation
Xiaomo Xu, G. Hlawacek, D. Wolf, T. Prüfer, R. Hübner, L. Bischoff, Helmholtz Zentrum Dresden-Rossendorf, Germany, M. Perego, Institute for Microelectronics and Microsystems (IMM-CNR), France, A. Gharbi, Laboratoire d'électronique des technologies de l'information (CEA-Leti), France, H.-J. Engelmann, S. Facsko, K.-H. Heinig, J. von Borany, Helmholtz Zentrum Dresden-Rossendorf, Germany
2:40pm NS+MN+MS+SS-WeA2
Scanning Tunneling Microscope Fabrication of Atomically Precise Devices
Richard Silver, NIST, X. Wang, University of Maryland, College Park, P. Namboodiri, J. Wyrick, S.W. Schmucker, M.D. Stewart, R. Murray, J.A. Hagmann, C. Richter, NIST
3:00pm NS+MN+MS+SS-WeA3
Contacting Buried Atomic-Precision Devices in Si using Kelvin Probe and Optical Microscopy
Jonathan Wyrick, P. Namboodiri, X. Wang, R. Murray, J.A. Hagmann, K. Li, S.W. Schmucker, M.D. Stewart, C. Richter, R.M. Silver, NIST
3:20pm NS+MN+MS+SS-WeA4
Quantifying Liquid Transport and Patterning using Atomic Force Microscopy
N. Farmakidis, Keith Brown, Boston University
4:20pm NS+MN+MS+SS-WeA7 Invited Paper
Positioning and Manipulating Single Dopant Atoms Inside Silicon
Andrew Lupini, B.M. Hudak, J. Song, Oak Ridge National Laboratory, H.R. Sims, Vanderbilt University, M.C. Troparevsky, Oak Ridge National Laboratory, S.T. Pantelides, Vanderbilt University, P.C. Snijders, Oak Ridge National Laboratory
5:00pm NS+MN+MS+SS-WeA9
Characterization of Butyl Tin Photoresists for Nanoscale Patterning
J.T. Diulus, R.T. Frederick, Oregon State University, M. Li, Rutgers University, D. Hutchison, M.R. Olsen, I. Lyubinetsky, L. Árnadóttir, Oregon State University, E.L. Garfunkel, Rutgers University, M. Nyman, Oregon State University, H. Ogasawara, SLAC National Accelerator Laboratory, Gregory Herman, Oregon State University
5:20pm NS+MN+MS+SS-WeA10
Impact of Polymer Templated Annealing on Gold Nanowires
Tyler Westover, R.F. Davis, B. Uptrey, J. Harb, A. Woolley, S. Noyce, Brigham Young University
5:40pm NS+MN+MS+SS-WeA11
Dynamic Growth of Nanopores on Graphene via Helium Ion Microscope
S. Kim, Anton Ievlev, M.J. Burch, I. Vlassiouk, A. Belianinov, S.V. Kalinin, S. Jesse, O.S. Ovchinnikova, Oak Ridge National Laboratory