| AVS 64th International Symposium & Exhibition | |
| Nanometer-scale Science and Technology Division | Wednesday Sessions |
| Session NS+MN+MS+SS-WeA |
| Session: | Nanopatterning, Nanofabrication and 3D Nanomanufacturing |
| Presenter: | Anton Ievlev, Oak Ridge National Laboratory |
| Authors: | S. Kim, Oak Ridge National Laboratory A.V. Ievlev, Oak Ridge National Laboratory M.J. Burch, Oak Ridge National Laboratory I. Vlassiouk, Oak Ridge National Laboratory A. Belianinov, Oak Ridge National Laboratory S.V. Kalinin, Oak Ridge National Laboratory S. Jesse, Oak Ridge National Laboratory O.S. Ovchinnikova, Oak Ridge National Laboratory |
| Correspondent: | Click to Email |
Controlling atomic-to-nanoscale defect formation on graphene is of significance as defects can modify properties as well as functionality of graphene. Especially, controlled formation of nanopores in graphene can be used for energy harvesting/storage, analysis of biomolecules and the separation of gases or liquids. Nanopores can be fabricated either by using high energy focused electron beam or by focused helium ion beam with high precision. However, focused electron beam has very low throughput to form nanopores despite its superiority in pore size control. On the contrary, focused helium ion beam has much higher throughput in nanofabrication with its capability to form sub-5nm pores. In this study, we utilized the focused helium ion microscope to fabricate nanopores on graphene and demonstrated atomic scale control in growth of nanopores by helium ion irradiation. We demonstrated the size control of nanopores down to ~ 3nm in a diameter. Formation and growth kinetics of nanopores by different helium ion irradiation conditions were explored and analyzed using the image data analytics. Also, Raman spectroscopic measurements was performed to demonstrate the effect of a helium ion dose on the change of initial defect density on graphene which leads to different behaviors and growth kinetics of nanopore formation.
This work was supported by the Oak Ridge National Laboratory’s Center for Nanophase Materials Sciences (CNMS), which is a U.S. Department of Energy, Office of Science User Facility.