| AVS 55th International Symposium & Exhibition | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MN-TuP1 Effects of Gate Fabrication Processes on Electrical Characteristics in Suspended Gate FET T. Kumada, H. Kasai, M. Edo, Y. Ichikawa, Fuji Electric Advanced Technology Co., Japan |
| MN-TuP2 Q-Factors of Suspended Al and Al-CNT Thin-Film Micromechanical Resonators as Function of Tensile Stress Y.J. Yi, J.H. Bak, Y.D. Kim, B.Y. Lee, S. Hong, Y.D. Park, Seoul National University, Republic of Korea |
| MN-TuP3 Test Instrument for the Tensile Fracture Strength of Micro-Nano Materials A. Kasahara, H. Suzuki, M. Goto, H. Araki, Y. Pihosh, M. Tosa, NRIM, Japan |
| MN-TuP4 Functionalization of Micro Mechanical Cantilever Sensors with TiO2 and γ-Fe2O3 Nanocrystals C. Ingrosso, M. Striccoli, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy, E. Sardella, IMIP-Bari, Italy, A. Voigt, G. Gruetzner, Micro Resist Technology GmbH, Germany, A. Agostiano, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy, S. Keller, G. Blagoi, A. Boisen, Technical University of Denmark, M.L. Curri, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy |