| AVS 55th International Symposium & Exhibition | |
| MEMS and NEMS | Tuesday Sessions |
| Session MN-TuP |
| Session: | MEMS and NEMS Poster Session |
| Presenter: | Y.J. Yi, Seoul National University, Republic of Korea |
| Authors: | Y.J. Yi, Seoul National University, Republic of Korea J.H. Bak, Seoul National University, Republic of Korea Y.D. Kim, Seoul National University, Republic of Korea B.Y. Lee, Seoul National University, Republic of Korea S. Hong, Seoul National University, Republic of Korea Y.D. Park, Seoul National University, Republic of Korea |
| Correspondent: | Click to Email |
We report on the Quality (Q) factor of micromechanical resonators, realized from suspended Al and Al-CNT nanolaminate thin-films,1 as function of tensile stress. The doubly-clamped beam micromechanical resonators with varying dimensions are realized on GaAs substrate, which is selectively removed. Suspension of microresonators is preceded by UHV sputter deposition of Al and carbon nanotube (CNT) network assembly and patterning by standard e-beam and photolithography techniques. The frequency response of micromechanical resonators are characterized by a laser vibrometer-like set-up while the microresonators are actuated electrostatically. With significant difference in coefficients of thermal expansion, the suspended metallic thin-films have significant intrinsic internal stress as evident from fits to resonant frequency as function of beam dimensions measurements. The internal stress is further varied by post-fabrication thermal treatments as well as by chip-bending method.2 Increase in Q-factors ultimately improves the force sensitivity of micromechanical resonator devices (i.e., mass sensing applications). Comparing the dependence of Q-factor to tensile stress of Al and Al-CNT thin-film microresonators allows for another avenue to study the mechanical enhancements due to CNT networks in the Al-CNT lamina.
1 J.H. Bak, Y.D.Kim et al., Nature Materials advance online publication, 20 April 2008 (doi:10.1038/nmat2181).
2 S.S. Verbridge et al., Nano Letters 7, 1728 (2007).