AVS 55th International Symposium & Exhibition
    MEMS and NEMS Tuesday Sessions
       Session MN-TuP

Paper MN-TuP4
Functionalization of Micro Mechanical Cantilever Sensors with TiO2 and γ-Fe2O3 Nanocrystals

Tuesday, October 21, 2008, 6:30 pm, Room Hall D

Session: MEMS and NEMS Poster Session
Presenter: C. Ingrosso, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy
Authors: C. Ingrosso, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy
M. Striccoli, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy
E. Sardella, IMIP-Bari, Italy
A. Voigt, Micro Resist Technology GmbH, Germany
G. Gruetzner, Micro Resist Technology GmbH, Germany
A. Agostiano, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy
S. Keller, Technical University of Denmark
G. Blagoi, Technical University of Denmark
A. Boisen, Technical University of Denmark
M.L. Curri, CNR-IPCF Sez. Bari c/o Dip. di Chimica, Italy
Correspondent: Click to Email

The oustanding flexibility of the surface chemistry of colloidal nanometer-sized particles1 allows their reliable manipulation as building blocks and opens the access to the development of original supramolecular approaches, devoted to the mesoscale organization of nanoparticles in hierarchical structures. In this work, 3D arrays of organic-capped colloidal NCs were covalently immobilized on the surface of micro mechanical cantilever sensors made of a negative tone epoxy photoresist matrix. Mechanical cantilever sensors surface functionalized with a sensing active layer are very active in the detection of target molecules.2 Q-sized colloidal NCs were immobilized at the surface of the miniaturized responsive components by means of the surface reactive residual epoxy at crosslinked photoresist matrix, which provide good accessibility to external interacting molecules, with an high immobilization capacity. The transferring of Q-sized colloidal NC properties to mechanically responsive miniaturized components represents an intriguing challenge, which disclose a great potential for extending the field of application of the ultrasensitive microfabricated mechanical cantilever sensors by exploiting novel transduction processes in molecule detection. Here, a simple solution-based method was adopted to modify the epoxy photoresist made cantilever surface with oleic acid (OLEA)-capped anatase TiO2 nanorod (NR) and nearly spherical maghemite γ-Fe2O3 NC building blocks. The morphological evolution of the native epoxy surface upon the attachment of NCs was monitored by Atomic Force Microscopy (AFM), while the effective covalent anchoring of the nanoparticles was demonstrated by means of X-Ray Photoelectron Spectroscopy (XPS). The photo/catalytic, magnetic and optical functionalities of NCs3 transferred to the high dense NC layout open the access to the development of novel MEMS/BIO-MEMS devices based on new bio/molecular recognition processes for bio/sensing or environmental purposes. Acknowledgements: The work was partially supported by the 7th FP EU project NOVOPOLY (STRP 013619)

1 Yin, Y. et al. Nature 437, (2005), 664.
2 Gfeller, K. Y.; Nugaeva, N.; Hegner, M. Biosens. Bioelectron. 21, (2005), 528.
3(a) Narazaki, A.; Kawaguchi, Y.; Niino, H.; Shojiya, M.; Koyo, H.; Tsunetomo, K. Chem. Mater. 17, (2005), 6651. (b) Detlef, M. S.; Thomas, S. R. J. Magn. Magn. Mater. 302, (2006), 267.