AVS 54th International Symposium
    Nanometer-scale Science and Technology Friday Sessions

Session NS-FrM
Nanolithography and Nanoprocess Technology

Friday, October 19, 2007, 8:00 am, Room 616
Moderators: S. Pang, University of Michigan, L. Montelius, University of Lund, Sweden


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am NS-FrM1 Invited Paper
Stencil Lithography - Quick & Clean Surface Patterning at Mesoscopic Scales
J. Brugger, Swiss Federal Institute of Technology (EPFL), Switzerland
8:40am NS-FrM3
Nanopatterning of Functional Polymers by Thermal Dip-Pen Nanolithography
W.K. Lee, P.E. Sheehan, U.S. Naval Research Laboratory, W.P. King, University of Illinois, Urbana-Champaign, L.J. Whitman, U.S. Naval Research Laboratory
9:00am NS-FrM4
Shadow Edge Lithography for Wafer-Scale Nanomanufacturing
J. Bai, J.-H. Chung, University of Washington
9:20am NS-FrM5
Conformal Intermediate Layers for Anti-Adhesive Coatings on Metal Molds
H. Schift, Paul Scherrer Institute, Switzerland, S. Bellini, ETH Zürich, Switzerland, H. Sehr, J. Gobrecht, Paul Scherrer Institute, Switzerland
9:40am NS-FrM6
Nanoscale Electron Beam Induced Etching (EBIE)
M.G. Lassiter, D. Smith, University of Tennessee, T. Liang, Intel Corporation, P.D. Rack, University of Tennessee
10:00am NS-FrM7 Invited Paper
Atomic-Scale Device Fabrication in Silicon
M.Y. Simmons, University of New South Wales, Australia
10:40am NS-FrM9
Advances in Atom Beam Nanolithography: A New Exposure Tool, Masks, and Resists
B. Craver, H. Guo, A. Roy, University of Houston, J. Strahan, University of Texas, J. Reynolds, H. Nounu, University of Houston, C.G. Willson, University of Texas, J.C. Wolfe, University of Houston
11:00am NS-FrM10
Resonances in Secondary Electron Yields from Capped Multilayer Mirrors
E. Loginova, B. Yakshinskiy, Rutgers University, S. Yulin, T. Feigel, Fraunhofer Institut (IOF), Germany, J. Keister, Brookhaven National Laboratory, T. Lucatorto, C. Tarrio, S. Hill, National Institute of Standards and Technology, O. Dulub, U. Diebold, Tulane University, M. Chandok, M. Fang, Intel Corporation, T.E. Madey, Rutgers University
11:20am NS-FrM11 Invited Paper
Miniature Machines for Nano-Scale Research and Manufacturing: A New Model for Equipment and Instrumentation
M.L. Culpepper, Massachusetts Institute of Technology