Invited Paper NS-FrM11
Miniature Machines for Nano-Scale Research and Manufacturing: A New Model for Equipment and Instrumentation

Friday, October 19, 2007, 11:20 am, Room 616

Advances in nanopositioning technology make it possible to (a) increase the pace of discoveries (via instruments) and (b) improve the pace with which discoveries are manufactured and commercialized. There are a growing number of instrument/equipment applications wherein small-scale (meso- and micro-scale) nanopositioners are needed in order to achieve commercially viable speeds (kHz), resolution (Angstroms), cost ($100s) and thermal stability (Angstroms/min). New small-scale nanopositioners are emerging to meet these requirements, however there are a few technological issues that must be addressed. The purpose of this talk is to cover (i) the fundamental reasons that will compel the creation of these nanopositioners, (ii) the economic and performance benefits that they will enable and (iii) how partnerships can help to overcome the few remaining technical/ scientific issues. The import of partnerships between machine design researchers, nanofabrication process researchers, and manufacturers will be stressed as well as a plan that is focused upon creating these partnerships. The talk ends with a vision for a new class of small-scale, low-cost instrument/equipment platforms to support a new model for nano-scale research and manufacturing.