| AVS 54th International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MN-TuP1 Surface Potential and Resistance Measurements for Detecting Wear of Chemically-Bonded and Unbonded Molecularly-Thick Perfluoropolyether Lubricant Films Using Atomic Force Microscopy M. Palacio, B. Bhushan, The Ohio State University |
| MN-TuP2 Wetting Behavior During Evaporation and Condensation of Water Microdroplets on Superhydrophbic Patterned Surfaces Y.C. Jung, B. Bhushan, The Ohio State University |
| MN-TuP3 The Effect of Sliding and Peeling Motion on Gecko Adhesion T.W. Kim, B. Bhushan, The Ohio State University |
| MN-TuP4 Nanotribological Studies of Platinum Coated Probes Sliding against Coated Silicon Wafers For Probe-based Recording Technology K.J. Kwak, B. Bhushan, The Ohio State University |
| MN-TuP5 A Microfluidic Device for the Spring Constant Calibration of Micro-Cantilevers and for Measuring Fluid Flow Velocities G.V. Lubarsky, G. Haehner, University of St. Andrews, UK |
| MN-TuP6 Improvement of Surface Roughness of Cerium Oxide Thin Film by Chemical Mechanical Polishing for Oxygen Gas Sensor P.-J. Ko, Y.-K. Jun, P.-G. Jung, Chosun University, Korea, N.-H. Kim, Sungkyunkwan University, Korea, W.-S. Lee, Chosun University, Korea |
| MN-TuP7 Fabrication of Body Insulated Conductive Cantilever with Metalic Nano Tip S.H. Park, Myongji University, Korea, S.H. Kim, Korea Electronics Technology Institute, C.J. Kang, Y.J. Choi, J.W. Kim, Y.S. Kim, Myongji University, Korea |
| MN-TuP8 A Robust Parametrically Excited MEMGyroscope L.A. Oropeza-Ramos, C.B. Burgner, C. Olroyd, K.L. Turner, University of California, Santa Barbara |
| MN-TuP9 Modeling of Asymmetric Microelectrode Array and Capillary Forces for Fluidic Self Assembly in MEMS A. Dang, Netaji Subhas Institute of Technology, India, M. Dhayal, National Physics Laboratory, India |
| MN-TuP10 Effect of Au Promoter Layers on NOx Sensitivity of Indium Oxide Solid State Sensor S. Kannan, M. Sorenson, L.W. Rieth, F. Solzbacher, University of Utah |
| MN-TuP11 XeF2 Etching of Metallic Films O. Celik, N. Shankar, A.V. Ermakov, L. Goncharova, Q. Jiang, L. Wielunski, E. Garfunkel, Rutgers University, X.M. Yan, A.L. Londergan, E. Gousev, Qualcomm MEMS Technologies |
| MN-TuP12 Parametric Amplification in Electromagnetically Actuated Resonant Chemical Sensors K. Lukes, K.L. Turner, University of California, Santa Barbara, J. Rhoads, S. Shaw, Michigan State University |
| MN-TuP13 Capacitive Displacement Sensing for Comb Drive Actuators Operating in Aqueous Media P. Ponce, V. Mukundan, B. Murmann, B.L. Pruitt, Stanford University |
| MN-TuP14 Assembly and Testing of Metal-based Microchannel Heat Exchange Devices F.H. Mei, J. Jiang, W.J. Meng, P.R. Parida, S.V. Ekkad, Louisiana State University |