AVS 54th International Symposium
    MEMS and NEMS Tuesday Sessions
       Session MN-TuP

Paper MN-TuP5
A Microfluidic Device for the Spring Constant Calibration of Micro-Cantilevers and for Measuring Fluid Flow Velocities

Tuesday, October 16, 2007, 6:00 pm, Room 4C

Session: MEMS and NEMS Poster Session
Presenter: G.V. Lubarsky, University of St. Andrews, UK
Authors: G.V. Lubarsky, University of St. Andrews, UK
G. Haehner, University of St. Andrews, UK
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We present a new microfluidic device and method based on cantilever sensing technology. Utilizing an artificially created force gradient the method can be applied for the non-destructive calibration of the normal spring constant of micro-cantilevers. In contrast to the most recent efforts to advance cantilever calibration, our method can be performed in situ, is easy to use, reliable, accurate, and non-destructive, i.e., does not involve any contact between the cantilever and another surface. The method has great potential for the calibration of modified probes, bio-sensor cantilevers etc. In addition, provided the dynamic properties of the cantilever sensor are designed and clearly defined, the device can be easily incorporated in microfluidic systems to measure the velocity of fluid flows.