| AVS 65th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Tuesday Sessions |
| Session PS+EM+NS+SS-TuA |
| Session: | Plasma Processing of Challenging Materials - II |
| Presenter: | Chisung Ahn, University of Illinois at Urbana-Champaign |
| Authors: | C. Ahn, University of Illinois at Urbana-Champaign E. Barlaz, University of Illinois at Urbana-Champaign D.N. Ruzic, University of Illinois at Urbana-Champaign |
| Correspondent: | Click to Email |
Pulsed femtosecond lasers have been used as a functionalization method for metal surfaces due to their ability to produce nanostructures uniformly with easily controlled user inputs such as spot size and exposure repetition. Laser assisted nitriding of Ti in ambient nitrogen has previously been demonstrated in our group to significantly reduce native oxides. A major challenge to the current process is the limited ability of the laser to produce nitrogen radicals.
In this study, we investigate the effects of increased nitrogen radical concentration on surface topography and chemical composition for textured Ti metal. A secondary DC plasma is generated along the path length of the laser close to the sample surface in ambient nitrogen and under vacuum. The surface topography and chemical compositions of the resultant Ti coupons are analyzed by SEM and XPS respectively. Changes to hydrophilicity are quantified using contact angle measurements.