| AVS 62nd International Symposium & Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | PS+2D+SE-WeM2 Diagnostics for Ionized Physical Vapor Deposition Chambers YuiLun Wu, P. Piotrowicz, University of Illinois at Urbana-Champaign, I.A. Shehelkanov, National Nuclear Research University (MEPhI), D.N. Ruzic, University of Illinois at Urbana-Champaign |
| 8:40am | PS+2D+SE-WeM3 Invited Paper Probing the Plasma Chemistry that Underpins Diamond Chemical Vapour Deposition Michael Ashfold, University of Bristol, United Kingdom of Great Britain and Northern Ireland, M.W. Kelly, B.S. Truscott, University of Bristol, UK, United Kingdom of Great Britain and Northern Ireland, Y.A. Mankelevich, Moscow State University, Russia, Russian Federation |
| 9:20am | PS+2D+SE-WeM5 Ionization Zones and the Deposition of Thin Films in the Transition Region from Non-Reactive to Reactive Magnetron Sputtering including dc, HiPIMS, and Burst-HiPIMS Modes Yuchen Yang, X. Zhou, A. Anders, Lawrence Berkeley Lab, University of California, Berkeley |
| 11:00am | PS+2D+SE-WeM10 Modelling of the Reactive High Power Impulse Magnetron Sputtering (HiPIMS) process JonTomas Gudmundsson, University of Iceland, D. Lundin, Université Paris-Sud, France, N. Brenning, KTH Royal Institute of Technology, Sweden, T. Minea, Université Paris-Sud, France |
| 11:20am | PS+2D+SE-WeM11 Pulsed Magnetron Sputtering Plasma Optimization for Large Area Growth of Two-dimensional MoS2 Andrey Voevodin, Air Force Research Laboratory, C. Muratore, University of Dayton, A.R. Waite, J. Bultman, A. Safriet, J. Hu, Air Force Research Laboratory |
| 11:40am | PS+2D+SE-WeM12 Molybdenum Nitride Formation by N2 Plasma Exposure on Molybdenum Disulfide: In-situ Surface Study Angelica Azcatl, X. Qin, Q. Wang, N. Lu, M.J. Kim, C.L. Hinkle, R.M. Wallace, The University of Texas at Dallas |
| 12:00pm | PS+2D+SE-WeM13 Low Temperature Synthesis of AlYB14 by High Power Pulsed Magnetron Sputtering Oliver Hunold, Y.T. Chen, D. Music, RWTH Aachen University, Germany, P.O.A. Persson, Linköping University, Sweden, J.M. Schneider, RWTH Aachen University, Germany |