| AVS 62nd International Symposium & Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
| Session PS+2D+SE-WeM |
| Session: | Plasma Diagnostics, Sensors and Control II |
| Presenter: | Oliver Hunold, RWTH Aachen University, Germany |
| Authors: | O. Hunold, RWTH Aachen University, Germany Y.T. Chen, RWTH Aachen University, Germany D. Music, RWTH Aachen University, Germany P.O.A. Persson, Linköping University, Sweden J.M. Schneider, RWTH Aachen University, Germany |
| Correspondent: | Click to Email |
The influence of ion bombardment on the structure evolution of AlYB14 was studied by using high power pulsed magnetron sputtering (HPPMS). The structure was analyzed by X-ray and electron diffraction. The diffraction data are consistent with the formation of crystalline AlYB14 domains in an amorphous matrix. As the growth temperature was 675 °C synthesis was conducted at 725 °C below the bulk synthesis temperature. It is reasonable to assume that this decrease in the growth temperature is facilitated by bombardment of ions formed in the HPPMS discharge resulting in enhanced surface diffusion and hence higher adatom mobility. This work may be relevant for synthesizing other boron rich solids with low symmetry crystal structures at temperatures well below their bulk synthesis temperature.