AVS 59th Annual International Symposium and Exhibition
    Thin Film Thursday Sessions

Session TF+NS+EM-ThM
Thin Films: Growth and Characterization-II

Thursday, November 1, 2012, 8:00 am, Room 11
Moderator: C. Vallee, LTM - MINATEC - CEA/LETI, France


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am TF+NS+EM-ThM1
Plasma-enhanced Atomic Layer Epitaxy of AlN Films on GaN
N. Nepal, J.K. Hite, N. Mahadik, M.A. Mastro, C.R. Eddy, Jr., U.S. Naval Research Laboratory
8:20am TF+NS+EM-ThM2
In Situ Infrared Spectroscopy Study of Cobalt Silicide Thin Film Growth by Atomic Layer Deposition
K. Bernal Ramos, University of Texas at Dallas, M.J. Saly, SAFC Hitech, J. Kwon, University of Texas at Dallas, M.D. Halls, Materials Design Inc., R.K. Kanjolia, SAFC Hitech, Y.J. Chabal, University of Texas at Dallas
8:40am TF+NS+EM-ThM3 Invited Paper
Thin Film Growth: From Gas Phase to Solid Phase – Links and Control
P. Raynaud, CNRS and University Paul Sabatier – Toulouse – France
9:20am TF+NS+EM-ThM5
Investigation of Precursor Infiltration and ALD Growth on Polymers and Effect on Fiber Mechanical Properties
R.P. Padbury, J.S. Jur, North Carolina State University
9:40am TF+NS+EM-ThM6
Atomic Layer Deposition Enabled Synthesis of Nanostructured Composite BiFeO3/CoFe2O4 Thin Films for Multiferroic Applications
C.D. Pham, J.P. Chang, University of California at Los Angeles
10:40am TF+NS+EM-ThM9
In Situ Infrared Spectroscopic Study of Atomic Layer Deposited TiO2 Thin Film Formation Using Non-Aqueous Routes
K. Bernal Ramos, University of Texas at Dallas, G. Clavel, Université Montpellier 2, France, C. Marichy, Universidade de Aveiro / CICECO, Portugal, W. Cabrera, The University of Texas at Dallas, N. Pinna, Universidade de Aveiro / CICECO, Portugal, Y.J. Chabal, University of Texas at Dallas
11:00am TF+NS+EM-ThM10
Nanomechanical Shaft-Loading Blister Testing of Thin Films
M. Berdova, A. Baby, J. Lyytinen, Aalto University, Finland, K. Grigoras, L. Kilpi, H. Ronkainen, VTT Technical Research Center, Finland, J. Koskinen, S. Franssila, Aalto University, Finland
11:20am TF+NS+EM-ThM11
Phase Formation and Thermal Stability of Arc-Evaporated ZrAlN Thin Films
L. Rogström, Linköping University, Sweden, M.P. Johansson, SECO Tools AB, Sweden, M. Ahlgren, Sandvik Tooling AB, Sweden, N. Ghafoor, Linköping University, Sweden, J. Almer, Advanced Photon Source, Argonne National Lab, L. Hultman, M. Odén, Linköping University, Sweden
11:40am TF+NS+EM-ThM12
Ion-assisted Epitaxial Sputter-Deposition and Properties of Metastable Zr1−xAlxN(001) (0.05 x 0.25 ) Alloys
AR.B. Mei, B.M. Howe, University of Illinois at Urbana Champaign, N. Ghafoor, E. Broitman, Linköping University, Sweden, M. Sardela, University of Illinois at Urbana Champaign, L. Hultman, Linköping University, Sweden, A. Rockett, J.E. Greene, I. Petrov, University of Illinois at Urbana Champaign, M. Oden, H. Fager, Linköping University, Sweden