AVS 57th International Symposium & Exhibition | |
MEMS and NEMS | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
8:00am | MN-ThM1 Invited Paper Mechanical Devices Incorporating Ultra-Thin Membranes H.G. Craighead, Cornell University |
8:40am | MN-ThM3 Functionalized CMOS Nanomechanical Resonators for Trace Explosives Detection J.W. Baldwin, Naval Research Laboratory, J.S. Burgess, National Research Council, M. Zalalutdinov, F.A. Bulat, Global Strategies Group, B.H. Houston, Naval Research Laboratory |
9:00am | MN-ThM4 Performance of Nanomechanical Mass Sensors Containing Nanofluidic Channels R.A. Barton, R.B. Ilic, S.S. Verbridge, B.R. Cipriany, J.M. Parpia, H.G. Craighead, Cornell University |
9:20am | MN-ThM5 Fabrication of Integrated Nanomagnets Overhanging Batch-Fabricated Attonewton-Sensitivity Cantilevers J.G. Longenecker, S.A. Hickman, E.W. Moore, S.G. Lee, S.J. Wright, Cornell University, L.E. Harrell, United States Military Academy, J.A. Marohn, Cornell University |
9:40am | MN-ThM6 Fabrication and Characterization Ultra-Sensitive, Nickel-Tipped Silicon Cantilevers for Magnetic Resonance Force Microscopy S.A. Hickman, E.W. Moore, S.G. Lee, S.J. Wright, Cornell University, L.E. Harrell, United States Military Academy, J.A. Marohn, Cornell University |
10:40am | MN-ThM9 Parametric Excitation of Large Amplitude Out-of-Plane Vibrations of Micro Beams By Fringing Electrostatic Fields S.L. Krylov, Tel Aviv University, Israel, N. Molinazzi, Medica Group, Italy, T. Shmilovich, U. Pomerantz, S. Lulinsky, Tel Aviv University, Israel |
11:00am | MN-ThM10 The Effect of Temperature on Etch Rate and Surface Roughness for Si Etched with Vapor Phase XeF2 Z.C. Leseman, J. Butner, University of New Mexico |
11:20am | MN-ThM11 Fabrication of High Density Single Crystal Silicon Nanowires for Ensemble Measurements D.A. Czaplewski, L.E. Ocola, M.V. Holt, Argonne National Laboratory |
11:40am | MN-ThM12 Analysis of a Dip-Solder Process for Self Assembly M.R. Rao, J. Lusth, S.L. Burkett, University of Alabama |