| AVS 57th International Symposium & Exhibition | |
| MEMS and NEMS | Thursday Sessions |
| Session MN-ThM |
| Session: | Multi-scale Interactions of Materials at the Micro- and Nano-scale |
| Presenter: | S.A. Hickman, Cornell University |
| Authors: | S.A. Hickman, Cornell University E.W. Moore, Cornell University S.G. Lee, Cornell University S.J. Wright, Cornell University L.E. Harrell, United States Military Academy J.A. Marohn, Cornell University |
| Correspondent: | Click to Email |
Magnetic Resonance Force Microscopy is a technique which combines the elemental discrimination and three-dimensional imaging of magnetic resonance with the spatial resolution of scanned probe microscopy. Key to this technique is attonewton-sensitivity mechanical oscillators with magnetic particles at the tip.
The aim of this work was to create silicon cantilevers with nickel magnets which extended past the tip of the cantilever body - a design conceived to minimize surface-induced force noise.
The fabrication challenges of this design, including alignment across multiple lithographic modes and silicide prevention, will be covered. As well, characterization data of successfully produced devices will be presented.