AVS 57th International Symposium & Exhibition | |
MEMS and NEMS | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
2:00pm | MN-ThA1 Electrothermal Tuning of Bistability in a Large Displacement Micro Actuator Y. Gerson, Tel Aviv University, Israel, R.B. Ilic, Cornell University, S.L. Krylov, Tel Aviv University, Israel |
2:20pm | MN-ThA2 Measured and Predicted Temperature Profiles along MEMS Bridges at Pressures from 0.05 to 625 Torr L.M. Phinney, J.R. Serrano, E.S. Piekos, J.R. Torczynski, M.A. Gallis, A.D. Gorby, Sandia National Laboratories |
2:40pm | MN-ThA3 Invited Paper Micro- and Nanoswitches: Materials, Design, Packaging and Reliability M.P. De Boer, Sandia National Laboratories, D.A. Czaplewski, Argonne National Laboratory, M.S. Baker, Sandia National Laboratories |
3:40pm | MN-ThA6 Bulk Focused Ion Beam Fabrication of Nanoelectromechanical Systems W.K. Hiebert, D. Vick, V. Sauer, National Institute for Nanotechnology (NRC Canada), A.E. Fraser, M.R. Freeman, University of Alberta, Canada |
4:00pm | MN-ThA7 NanoFIBrication of UHAR Vias Using a Material Shaping Technique for Phononic Crystals D.F. Goettler, Z.C. Leseman, University of New Mexico |
4:20pm | MN-ThA8 Highly Robust Hydrogen Selective MEMS Nanogap Sensor Utilizing the Schottky Barrier at Electrode/Sensing Material A. Kumar, P. Zhang, H.J. Cho, S. Seal, University of Central Florida |
4:40pm | MN-ThA9 Development of Lab-on-a-chip on Mn Induced Nano-arrayed Structures in Sol-gel Derived TiO2 Platforms for Biosensing Applications R.R. Pandey, Centre for Cellular and Molecular Biology, India, K.K. Saini, National Physical Laboratory, India, M. Dhayal, Centre for Cellular and Molecular Biology, India |