AVS 57th International Symposium & Exhibition
    MEMS and NEMS Thursday Sessions

Session MN-ThA
Integration, Packaging and Reliability of MEMS and NEMS

Thursday, October 21, 2010, 2:00 pm, Room Santo Domingo
Moderator: M. Metzler, Cornell University


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm MN-ThA1
Electrothermal Tuning of Bistability in a Large Displacement Micro Actuator
Y. Gerson, Tel Aviv University, Israel, R.B. Ilic, Cornell University, S.L. Krylov, Tel Aviv University, Israel
2:20pm MN-ThA2
Measured and Predicted Temperature Profiles along MEMS Bridges at Pressures from 0.05 to 625 Torr
L.M. Phinney, J.R. Serrano, E.S. Piekos, J.R. Torczynski, M.A. Gallis, A.D. Gorby, Sandia National Laboratories
2:40pm MN-ThA3 Invited Paper
Micro- and Nanoswitches: Materials, Design, Packaging and Reliability
M.P. De Boer, Sandia National Laboratories, D.A. Czaplewski, Argonne National Laboratory, M.S. Baker, Sandia National Laboratories
3:40pm MN-ThA6
Bulk Focused Ion Beam Fabrication of Nanoelectromechanical Systems
W.K. Hiebert, D. Vick, V. Sauer, National Institute for Nanotechnology (NRC Canada), A.E. Fraser, M.R. Freeman, University of Alberta, Canada
4:00pm MN-ThA7
NanoFIBrication of UHAR Vias Using a Material Shaping Technique for Phononic Crystals
D.F. Goettler, Z.C. Leseman, University of New Mexico
4:20pm MN-ThA8
Highly Robust Hydrogen Selective MEMS Nanogap Sensor Utilizing the Schottky Barrier at Electrode/Sensing Material
A. Kumar, P. Zhang, H.J. Cho, S. Seal, University of Central Florida
4:40pm MN-ThA9
Development of Lab-on-a-chip on Mn Induced Nano-arrayed Structures in Sol-gel Derived TiO2 Platforms for Biosensing Applications
R.R. Pandey, Centre for Cellular and Molecular Biology, India, K.K. Saini, National Physical Laboratory, India, M. Dhayal, Centre for Cellular and Molecular Biology, India