AVS 57th International Symposium & Exhibition
    Energy Frontiers Topical Conference Monday Sessions
       Session EN+PS-MoM

Paper EN+PS-MoM9
Surface Composition and Gas-Phase Passivation of Plasma-Synthesized Si Nanoparticles

Monday, October 18, 2010, 11:00 am, Room Mesilla

Session: Plasmas for Photovoltaics & Energy Applications
Presenter: B.N. Jariwala, Colorado School of Mines
Authors: B.N. Jariwala, Colorado School of Mines
N.J. Kramer, Eindhoven University of Technology, Netherlands
B.G. Lee, National Renewable Energy Laboratory
P. Stradins, National Renewable Energy Laboratory
M.C.M. van de Sanden, Eindhoven University of Technology, Netherlands
C.V. Ciobanu, Colorado School of Mines
S. Agarwal, Colorado School of Mines
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Tunable band gap of c-Si nanoparticles (NPs) (<5 nm) along with the possibility of multiple exciton generation has led to an increased interest in this form of Si as a material for 3rd generation photovoltaic (PV) devices. In addition to a high degree of control over the particle size, surface passivation of the NPs is key to their utilization in PV applications. In this presentation, we will primarily focus on understanding the growth of Si NPs in a dusty plasma, determining the surface composition of the NPs, and demonstrating novel techniques for passivation and encapsulation through the gas-phase. The particles are grown in a SiH4/Ar plasma generated in a tubular flow rf discharge. The plasma source is attached to an in-house-built vacuum chamber equipped with in situ attenuated total reflection Fourier-transform infrared (ATR-FTIR) spectroscopy and a quadrupole mass spectrometer. Using this technique, we have synthesized Si NPs in the size range of 3-7 nm, which transition from amorphous to crystalline over the rf power range of 5 to 40 W. The in situ IR data show that the surface hydride composition of the NPs is related to their crystallinity, which in turn depends on particle heating during synthesis. The as-synthesized NPs surfaces are terminated with Si mono-, di- and tri-hydrides. The higher hydride concentration decreases with increasing particle crystallinity, similar to previous observations on the amorphous Si surfaces, where higher Si hydrides are known to decompose with increasing deposition temperatures. These results also are consistent with the particle heating models proposed for dusty plasmas. In the first surface passivation approach, the as-synthesized H-terminated Si NPs, which oxidize even under high-vacuum conditions, are passivated in situ through hydrosilylation using 1-alkenes of different chain lengths. We have used density functional theory calculations to investigate the detailed reaction mechanism for various alkene chain lengths, and to understand the effects of alkene coverage on the oxidation of the surface. The surface reaction kinetics for hydrosilylation is observed in situ by monitoring the C-H and Si-H stretching vibrations. The ligand coverage is determined to be roughly 50% of the surface sites, which is sufficient to prevent oxidation for several hours. The quality of surface passivation is further determined through the photoluminescence quantum yield measurements, which show a higher yield for surface passivated NPs. In the second approach, the NPs are passivated with metal oxides using atomic layer deposition that involves the two different oxidation steps with O3 and H2O to achieve deposition at <200 °C.