AVS 57th International Symposium & Exhibition
    Energy Frontiers Topical Conference Monday Sessions
       Session EN+PS-MoM

Paper EN+PS-MoM11
Arc Energy in Large Scale Magnetron Sputtering

Monday, October 18, 2010, 11:40 am, Room Mesilla

Session: Plasmas for Photovoltaics & Energy Applications
Presenter: D. Carter, Advanced Energy Industries, Inc.
Authors: D. Carter, Advanced Energy Industries, Inc.
H. Walde, Advanced Energy Industries, Inc.
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A detailed analysis of sputtering arcs on a large scale (3400 cm2) magnetron source reveals some common trends related to energy absorbed in these events and the progression of current and voltage through their duration. Examination of these trends provides insight into the rapid release of arc energy and some of the practical limitations of the techniques used to minimize their impact on deposition processes. Two very different but equally important materials were studied, metallic aluminum and ceramic, aluminum-doped, zinc oxide. While the characteristics and behaviors of arcs from these two materials are generally similar, subtle distinctions in the evolution of current and voltage explain a significant difference in measured arc energies. These observations present factors for consideration regarding arc suppression and also raise the question of what is the minimum achievable arc energy. In an attempt to answer this fundamental question a stored energy model for a large scale magnetron system is proposed. Using practical assumptions for sheath capacitance and source inductance, minimum arc energy is calculated to serve as the ultimate goal for a next generation arc detection and suppression system.