| AVS 56th International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | VT-MoM1 Invited Paper Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance D.A. Smith, SilcoTek Corporation, B.R.F. Kendall, Elvac Associates |
| 9:00am | VT-MoM3 Modeling Decontamination of Vacuum Chambers by Downstream Plasma Cleaning C.G. Morgan, R. Vane, XEI Scientific, Inc. |
| 9:20am | VT-MoM4 Methods for Measuring Outgassing for Qualification of Materials, Components and Systems N.B. Koster, R. Koops, E. van Zeijl, TNO Science and Industry, Netherlands |
| 9:40am | VT-MoM5 Outgassing Characterization of Elastomeric Seals Used in Semiconductor Wafer Processing M. Heller, S. Sogo, J. Chen, J. Legare, DuPont Performance Elastomers L.L.C. |
| 10:00am | VT-MoM6 Permeation Through Elastomers: Comparison of Viton® and Chemraz® 653 O-rings under Controlled Compression and Temperature N.T. Peacock, MKS Instruments, HPS Products |
| 10:40am | VT-MoM8 Controlled Formation of Condensed Frost Layers in Cryogenic High Vacuum Pumps S.E. Syssoev, A.J. Bartlett, M.J. Eacobacci, Brooks Automation Inc. |
| 11:00am | VT-MoM9 Combination of Compact NEG and Small Ion Pumps for UHV Systems P. Manini, SAES Getters, Italy, C.D. Park, S.M. Chung, Pohang Accelerator Laboratory, South Korea |
| 11:20am | VT-MoM10 Water Vapor Cryopumping: Refrigerant Phaseout Compliance K. Flynn, C. Rebecchi, Brooks Automation Polycold Systems |
| 11:40am | VT-MoM11 Vacuum Processing for the 21st Century S. Ormrod, N. Schofield, Edwards Ltd, UK |