AVS 56th International Symposium & Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM4
Methods for Measuring Outgassing for Qualification of Materials, Components and Systems

Monday, November 9, 2009, 9:20 am, Room C1

Session: Vacuum Contamination and Pumping
Presenter: N.B. Koster, TNO Science and Industry, Netherlands
Authors: N.B. Koster, TNO Science and Industry, Netherlands
R. Koops, TNO Science and Industry, Netherlands
E. van Zeijl, TNO Science and Industry, Netherlands
Correspondent: Click to Email
Presently cleanliness requirements for vacuum systems in use for Extreme Ultra Violet Lithography (EUVL) are beyond what with standard procedures can be achieved. Especially the constraint that the system cannot be baked after assembly, whilst cleanliness better than UHV is needed, requires special measures with respect to manufacturing and qualification. Because of the constraint of not being able to bake the system we refer to this type of vacuum as Ultra Clean Vacuum (UCV). This presentation will focus on outgassing measurement methods for qualification of materials and components. Traditionally only the total outgassing is measured and reported, as can be found in many vacuum handbooks. In the case of EUVL, or other systems with high energetic particles, we distinguish several species of interest, like water and hydrocarbons and provide numbers for outgassing of these species as measured with a RGA. These measurements enable engineers to calculate total pressure and cleanliness of a system under design. Results of these measurements will be shown including a way of representing the data in a clear format. We also will show results of a new method for measuring hydrocarbon outgassing with the aid of a RGA when the outgassing levels are at the lower detection limit of the RGA.