AVS 53rd International Symposium
    Nanometer-scale Science and Technology Thursday Sessions

Session NS-ThA
Nanoscale Material Processing

Thursday, November 16, 2006, 2:00 pm, Room 2016
Moderator: S. Jesse, Oak Ridge National Laboratory


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm NS-ThA1
Controlled Chemical Mechanical Polishing of Polysilicon and Silicon-Dioxide for Nanostructures
V. Joshi, A.O. Orlov, G.L. Snider, University of Notre Dame
2:20pm NS-ThA2
Properties of Carbon-Based Nanostructures Grown by Low-Pressure Plasma Enhanced Chemical Vapor Deposition
J.B.O. Caughman, L.R. Baylor, R.A. Kisner, K. Korsah, Oak Ridge National Laboratory
2:40pm NS-ThA3 Invited Paper
Prospects and Processing of Soft Materials
G.G. Malliaras, Cornell University
3:20pm NS-ThA5
Synthesis of Suspended Single-Walled Carbon Nanotubes on Tips of Silicon Nanostructures Fabricated by Plasma Etching
C.H. Weng, H.C. Su, W.Y. Lee, C.H. Tsai, K.C. Leou, National Tsing Hua University, ROC
3:40pm NS-ThA6
Fabrication of Thin Silicon Nanodisk for Quantum Effect Devices Using Cl Neutral Beam Etching and Ferritin Iron Core Mask
T. Kubota, T. Hashimoto, Tohoku University, Japan, M. Takeguchi, National Institute for Materials Science, Japan, Y. Uraoka, T. Fuyuki, Nara Institute of Science and Technology, Japan, I. Yamashita, Matsushita Electric Industrial Co., Ltd. and Nara Institute of Science and Technology, Japan, S. Samukawa, Tohoku University, Japan
4:00pm NS-ThA7
Cool Plasma Functionalization of Nanodiamond Particles
G.E. McGuire, M.A. Ray, O. Shenderova, W.M. Hooke, A. Martin, T. Tyler, G. Cunningham, V. Grishko, International Technology Center
4:20pm NS-ThA8
ZnCdSe Ternary Nanophosphors
H.-J. Lee, University of Florida, H. Yang, Hongik University, South Korea, S.Y. Seo, P.H. Holloway, University of Florida
4:40pm NS-ThA9
Multiphysics Modeling of Electrochemical Structuring Using Complex Tool Electrodes
J.A. Kenney, G.S. Hwang, University of Texas at Austin